Influence of oxide film surface morphology and thickness on the properties of gas sensitive nanostructure sensor (Record no. 10927)

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005 - DATE AND TIME OF LATEST TRANSACTION
control field 20200115125515.0
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fixed length control field 200115b xxu||||| |||| 00| 0 eng d
040 ## - CATALOGING SOURCE
Original cataloging agency AIKTC-KRRC
Transcribing agency AIKTC-KRRC
100 ## - MAIN ENTRY--PERSONAL NAME
9 (RLIN) 11727
Author Pour, G. Behzadi
245 ## - TITLE STATEMENT
Title Influence of oxide film surface morphology and thickness on the properties of gas sensitive nanostructure sensor
250 ## - EDITION STATEMENT
Volume, Issue number Vol.57(10), Oct
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. New Delhi
Name of publisher, distributor, etc. CSIR
Year 2019
300 ## - PHYSICAL DESCRIPTION
Pagination 743-749p.
520 ## - SUMMARY, ETC.
Summary, etc. In this study, the gas sensitive metal-oxide semiconductor (MOS) nanostructure sensors based on Ni thin film have been fabricated. The influences of SiO2film surface morphology and thickness on the response (R%) and electrical properties of the sensors have been investigated at 150 °C. The surface morphology of the SiO2film has been characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The C-V curves of the MOS nanostructure sensors in pure nitrogen and 2 % hydrogen have been reported as well. For the SiO2film thicknesses of 14, 65 and 74 nmthe measured flat-band voltages (VFB) are 0.7, 1.5 and 2 V, respectively. The responses of different sensors in 2% hydrogen for SiO2film thicknesses of 14 and 74 nm are 84% and 32%, respectively.The MOS nanostructure sensors exhibited good response to the hydrogen gas, with excellent sensitivity. The MOS nanostructure sensor based on Ni thin film and SiO2film thickness of 14 nm shows high response and sensitivity
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
9 (RLIN) 4642
Topical term or geographic name entry element Humanities and Applied Science
700 ## - ADDED ENTRY--PERSONAL NAME
9 (RLIN) 11728
Co-Author Aval, L. Fekri
773 0# - HOST ITEM ENTRY
Place, publisher, and date of publication New Delhi CSIR-NISCAIR
Title Indian journal of pure & applied physics (IJPAP)
International Standard Serial Number 0019-5596
856 ## - ELECTRONIC LOCATION AND ACCESS
URL http://nopr.niscair.res.in/bitstream/123456789/51111/1/IJPAP%2057%2810%29%20743-749.pdf
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          School of Engineering & Technology School of Engineering & Technology Archieval Section 2020-01-15 2020710 2020-01-15 2020-01-15 Articles Abstract Database
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