Pankratov, E. L. <br/><br/>
On optimization of manufacturing of an operational transconductance amplifier based on heterostructures to increase density of their elements: Influence of mismatch-induced stress and porosity of materials on technological process 

 - Vol.3(2), Jul-Dec 
 - South Africa  AkiNik Publications  2022 
 - 7-32p. 
<br/><br/> n this paper we introduce an approach to increase density of field-effect transistors in the framework<br/>of an operational transconductance amplifier. In the framework of the approach we consider<br/>manufacturing the amplifier in heterostructure with specific configuration. Several required areas of the<br/>heterostructure should be doped by diffusion or ion implantation. After that dopant and radiation<br/>defects should by annealed framework optimized scheme. We also consider an approach to decrease<br/>value of mismatch-induced stress in the considered heterostructure. We introduce an analytical<br/>approach to analyze mass and heat transport in heterostructures during manufacturing of integrated<br/>circuits with account mismatch-induced stress. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical Engineering