Pankratov, E. L. <br/><br/>
Influence of substrate preliminary processing on the properties of the heterostructure 

 - Vol.3(2), Jul-Dec 
 - South Africa  AkiNik Publications  2022 
 - 105-121p. 
<br/><br/> In this paper we analyze effect of preliminary processing of substrate on properties of the grown<br/>heterostructure. It has been shown that growth of an epitaxial layer on a buffer layer after preliminary<br/>(before starting of growth) annealing makes it possible to decrease of value of miss match-induced<br/>stress. An analytical approach has been introduced for analysis of mass and heat transfer in a multilayer<br/>structures with account miss match-induced stress. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electrical Engineering