000			03448nam a22005055i 4500
999			_c12221 _d12221
001			978-3-319-50824-5
003			DE-He213
005			20211202150221.0
008			170222s2017 gw | s |||| 0|eng d
020			_a9783319508245
040			_cAIKTC-KRRC
041			_aENG
072		7	_aTJFC _2bicssc
072		7	_aTEC008010 _2bisacsh
072		7	_aTJFC _2thema
082	0	4	_a621.3815 _223
245	1	0	_aOutlook and Challenges of Nano Devices, Sensors, and MEMS _h[electronic resource] /
250			_a1st ed. 2017.
264		1	_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2017.
300			_aXVI, 521 p. 367 illus., 272 illus. in color. _bCard Paper
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
520			_aThis book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.
650		0	_aEXTC Engineering _94619
653			_aElectronic Circuits and Devices.
653			_aNanotechnology and Microengineering.
653			_aNanotechnology.
700	1		_aLi, Ting. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt
700	1		_aLiu, Ziv. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt
710	2		_aSpringerLink (Online service)
773	0		_tSpringer Nature eBook
776	0	8	_iPrinted edition: _z9783319508221
776	0	8	_iPrinted edition: _z9783319508238
776	0	8	_iPrinted edition: _z9783319845005
856	4	0	_uhttps://doi.org/10.1007/978-3-319-50824-5 _zClick here to access eBook in Springer Nature platform. (Within Campus only.)
942			_cEBOOKS _2ddc