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_d19457
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040 _aAIKTC-KRRC
_cAIKTC-KRRC
100 _919019
_aPankratov, E. L.
245 _aInfluence of substrate preliminary processing on the properties of the heterostructure
250 _aVol.3(2), Jul-Dec
260 _aSouth Africa
_bAkiNik Publications
_c2022
300 _a105-121p.
520 _aIn this paper we analyze effect of preliminary processing of substrate on properties of the grown heterostructure. It has been shown that growth of an epitaxial layer on a buffer layer after preliminary (before starting of growth) annealing makes it possible to decrease of value of miss match-induced stress. An analytical approach has been introduced for analysis of mass and heat transfer in a multilayer structures with account miss match-induced stress.
650 0 _94623
_aElectrical Engineering
773 0 _x2708-4574
_tInternational journal of advances in electrical engineering
_dJohannesburg AkiNik Publications
856 _uhttps://www.electricaltechjournal.com/article/29/3-2-4-730.pdf
_yClick here
942 _2ddc
_cAR