Silicon Anodization as a Structuring Technique (Record no. 13665)

MARC details
000 -LEADER
fixed length control field 03516nam a22005415i 4500
001 - CONTROL NUMBER
control field 978-3-658-19238-9
003 - CONTROL NUMBER IDENTIFIER
control field DE-He213
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20211215160314.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 170911s2018 gw | s |||| 0|eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783658192389
040 ## - CATALOGING SOURCE
Transcribing agency AIKTC-KRRC
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title ENG
072 #7 - SUBJECT CATEGORY CODE
Subject category code TDPB
Source bicssc
072 #7 - SUBJECT CATEGORY CODE
Subject category code TEC027000
Source bisacsh
072 #7 - SUBJECT CATEGORY CODE
Subject category code TDP
Source thema
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 620.5
Edition number 23
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Ivanov, Alexey.
Relator term author.
Relator code aut
-- http://id.loc.gov/vocabulary/relators/aut
245 10 - TITLE STATEMENT
Title Silicon Anodization as a Structuring Technique
Medium [electronic resource] :
Remainder of title Literature Review, Modeling and Experiments /
250 ## - EDITION STATEMENT
Edition statement 1st ed. 2018.
264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Place of production, publication, distribution, manufacture Wiesbaden :
Name of producer, publisher, distributor, manufacturer Springer Fachmedien Wiesbaden :
-- Imprint: Springer Vieweg,
Date of production, publication, distribution, manufacture, or copyright notice 2018.
300 ## - PHYSICAL DESCRIPTION
Extent XXIX, 316 p. 141 illus., 3 illus. in color.
Other physical details | Binding - Card Paper |
336 ## - CONTENT TYPE
Content type term text
Content type code txt
Source rdacontent
337 ## - MEDIA TYPE
Media type term computer
Media type code c
Source rdamedia
338 ## - CARRIER TYPE
Carrier type term online resource
Carrier type code cr
Source rdacarrier
347 ## - DIGITAL FILE CHARACTERISTICS
File type text file
Encoding format PDF
Source rda
520 ## - SUMMARY, ETC.
Summary, etc. Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Mechanical Engineering
9 (RLIN) 4626
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Nanotechnology and Microengineering.
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Mathematical and Computational Engineering.
653 ## - INDEX TERM--UNCONTROLLED
Uncontrolled term Engineering Thermodynamics, Heat and Mass Transfer.
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element SpringerLink (Online service)
773 0# - HOST ITEM ENTRY
Title Springer Nature eBook
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Relationship information Printed edition:
International Standard Book Number 9783658192372
776 08 - ADDITIONAL PHYSICAL FORM ENTRY
Relationship information Printed edition:
International Standard Book Number 9783658192396
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1007/978-3-658-19238-9">https://doi.org/10.1007/978-3-658-19238-9</a>
Public note Click here to access eBook in Springer Nature platform. (Within Campus only.)
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type eBooks
Source of classification or shelving scheme Dewey Decimal Classification

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