Nanofabrication [electronic resource] : Principles, Capabilities and Limits /

By:

Cui, Zheng [author.]

Contributor(s):

SpringerLink (Online service)

Language: ENG Publisher: Cham : Springer International Publishing : Imprint: Springer, 2017Edition: 2nd ed. 2017Description: XVII, 432 p. 316 illus., 50 illus. in color. | Binding - Card Paper |Content type:

text

Media type:

computer

Carrier type:

online resource

ISBN:

9783319393612

Subject(s):

Additional physical formats: Printed edition:: No title; Printed edition:: No title; Printed edition:: No titleDDC classification:

620.5 23

Online resources:

Click here to access eBook in Springer Nature platform. (Within Campus only.)

In: Springer Nature eBookSummary: This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

List(s) this item appears in: Springer Nature eBooks

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This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

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