Pankratov, E. L.
Influence of substrate preliminary processing on the properties of the heterostructure - Vol.3(2), Jul-Dec - South Africa AkiNik Publications 2022 - 105-121p.
In this paper we analyze effect of preliminary processing of substrate on properties of the grown
heterostructure. It has been shown that growth of an epitaxial layer on a buffer layer after preliminary
(before starting of growth) annealing makes it possible to decrease of value of miss match-induced
stress. An analytical approach has been introduced for analysis of mass and heat transfer in a multilayer
structures with account miss match-induced stress.
Electrical Engineering
Influence of substrate preliminary processing on the properties of the heterostructure - Vol.3(2), Jul-Dec - South Africa AkiNik Publications 2022 - 105-121p.
In this paper we analyze effect of preliminary processing of substrate on properties of the grown
heterostructure. It has been shown that growth of an epitaxial layer on a buffer layer after preliminary
(before starting of growth) annealing makes it possible to decrease of value of miss match-induced
stress. An analytical approach has been introduced for analysis of mass and heat transfer in a multilayer
structures with account miss match-induced stress.
Electrical Engineering