Influence of substrate preliminary processing on the properties of the heterostructure
By: Pankratov, E. L
.
Publisher: South Africa AkiNik Publications 2022Edition: Vol.3(2), Jul-Dec.Description: 105-121p.Subject(s): Electrical EngineeringOnline resources: Click here
In:
International journal of advances in electrical engineeringSummary: In this paper we analyze effect of preliminary processing of substrate on properties of the grown
heterostructure. It has been shown that growth of an epitaxial layer on a buffer layer after preliminary
(before starting of growth) annealing makes it possible to decrease of value of miss match-induced
stress. An analytical approach has been introduced for analysis of mass and heat transfer in a multilayer
structures with account miss match-induced stress.
| Item type | Current location | Call number | Status | Date due | Barcode | Item holds |
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School of Engineering & Technology Archieval Section | Not for loan | 2023-0874 |
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In this paper we analyze effect of preliminary processing of substrate on properties of the grown
heterostructure. It has been shown that growth of an epitaxial layer on a buffer layer after preliminary
(before starting of growth) annealing makes it possible to decrease of value of miss match-induced
stress. An analytical approach has been introduced for analysis of mass and heat transfer in a multilayer
structures with account miss match-induced stress.
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